904 - Compound Semiconductor Plasma Processing Equipment
What the buyer wrote
The College of Engineering and Physical Sciences (EPS) at Aston university is creating a III-V semiconductor fabrication facility. As a consequence, we are seeking a single supplier to provide a suite of plasma processing tools for: • ICP Etch of semiconductor materials (e.g. GaAs, GaN, InP, GaSb) • RIE Etch of dielectric materials (e.g. SiO2, SiNx) and metals (e.g. Au, Ge, Cr, Ti, Pt, Pd) • Deposition of dielectric layers (e.g. SiO2, SiNx) The full project specific requirements and equipment specification can be found within the project question set on Aston University’s e-tendering portal ProContract under Section 11 – Project Specific Requirements.
Details
- What the buyer calls it
- 904 - Compound Semiconductor Plasma Processing Equipment
- How they are buying
- Advertised, open to anyoneAny supplier could bid without being invited first.
- Type
- goods
- Where
- in the West Midlands
Who the buyer named
Mrs Shirley O'Reilly was the named contact on this notice.