Supply and Installation of 3D Laser Lithography System to the University of Birmingham

The University of Birmingham invites tenders for supply of a - Fastest, most precise and sophisticated 3D laser lithography system for two-dimensional as well as three-dimensional micro- and nanofabrication. o Pulsed laser system with safety level: Laser class 1 o Laser scan speed: >10 mm/s o Laser with a two-photon polymerization o Lithography accuracy range: submicrometer- to meso-scale, 3 order of magnitude o Lithography minimum lateral features sizes for 2D structure: < 200 nm; for 3D: <= 200 nm o Lithography minimum features sizes for 3D structure in z direction: < 800 nm o Lithography minimum in-plane line distance: < 500 nm o Motorized stage with patterning area >= 100 x 10…

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